EE C247B. Introduction to MEMS Design

Catalog Description: Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required.

Units: 4.0

Prerequisites: Graduate standing in engineering or science; undergraduates with consent of instructor.

Fall: 3 hours of lecture and 1 hour of discussion per week
Spring: 3 hours of lecture and 1 hour of discussion per week

Grading basis: letter

Final exam status: Written final exam conducted during the scheduled final exam period

Also listed as: MEC ENG C218, EL ENG C247B

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