Catalog Description: Physics, fabrication and design of micro electromechanical systems (MEMS). Micro and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, and magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required.

Units: 4

Prerequisites: MAS-IC students only.

Credit Restrictions: Students will receive no credit for EE W247B after taking EE C247B or Mechanical Engineering C218.

Formats:
Spring: 3 hours of web-based lecture and 1 hour of web-based discussion per week
Summer: 4.5 hours of web-based lecture and 1.5 hours of web-based discussion per week
Fall: 3 hours of web-based lecture and 1 hour of web-based discussion per week

Grading basis: letter

Final exam status: No final exam

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