Catalog Description: Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required.
Units: 4
Prerequisites: Graduate standing in engineering or science; undergraduates with consent of instructor.
Formats:
Spring: 3 hours of lecture and 1 hour of discussion per week
Fall: 3 hours of lecture and 1 hour of discussion per week
Grading basis: letter
Final exam status: Written final exam conducted during the scheduled final exam period
Also listed as: MEC ENG C218
Class Schedule (Spring 2023):
TuTh 09:30-10:59, Cory 293 –