Books

• R. S. Muller, T. I. Kamins, and M. Chan, Device Electronics for Integrated Circuits, 3rd ed., New York, NY: John Wiley and Sons, Inc., 2003.
• R. S. Muller, R. T. Howe, S. D. Senturia, R. L. Smith, and R. M. White, Eds., Microsensors, New York: IEEE Press, 1991.
• R. S. Muller and T. I. Kamins, Device Electronics for Integrated Circuits, 2nd ed., New York: Wiley, 1986.
• R. S. Muller and T. I. Kamins, Device Electronics for Integrated Circuits, New York: Wiley, 1977.

Book chapters or sections

• R. S. Muller, "Microsystem technologies, MEMS and NEMS (in Chinese)," in Microsystem and Technology, Z. Zhou, Ed., Beijing, China: China Science Press, 2007, pp. 787-790.
• B. C. Y. Lin, T. King Liu, and R. S. Muller, "Poly-SiGe MEMS actuators for adaptive optics," in MEMS/MOEMS Components and Their Applications IIII, S. S. Olivier, S. A. Tadigadapa, and A. K. Henning, Eds., Proceedings of SPIE, Vol. 6113, Bellingham, WA: SPIE -- Society of Photo-Optical Instrumentation Engineers, 2006, pp. 61130S-1-7.

Articles in journals or magazines

• T. J. Seok, J. Luo, Z. Huang, K. Kwon, J. Henriksson, J. Jacobs, L. Ochikubo, R. S. Muller, and M. C. Wu, "Silicon photonic wavelength cross-connect with integrated MEMS switching," APL Photonics, vol. 4, no. 10, pp. 100803, Oct. 2019.
• R. Kant, D. Garmire, H. Coo, and R. S. Muller, "Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer," Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on, pp. 57-58, Aug. 2007.
• H. Choo and R. S. Muller, "Devices, structures, and processes for optical MEMS (Invited Review)," IEEJ Trans. Electrical and Electronic Engineering, vol. 2, no. 3, pp. 216-231, May 2007.
• H. Choo, D. Garmire, J. Demmel, and R. S. Muller, "Simple fabrication process for self-aligned, high-performance microscanners--Demonstrated use to generate a 2-D ablation pattern," J. Microelectromechanical Systems, vol. 16, no. 2, pp. 260-268, April 2007.
• H. Choo and R. S. Muller, "Addressable microlens array to improve dynamic range of Shack-Hartmann sensors," J. Microelectromechanical Systems, vol. 15, no. 6, pp. 1555-1567, Dec. 2006.
• J. Kim, H. Choo, L. Lin, and R. S. Muller, "Microfabricated torsional actuators using self-aligned plastic deformation of silicon," J. Microelectromechanical Systems, vol. 15, no. 3, pp. 553-562, June 2006.
• P. S. Riehl, K. L. Scott, R. S. Muller, R. T. Howe, and J. A. Yasaitis, "Electrostatic charge and field sensors based on micromechanical resonators," IEEE/ASME J. Microelectromechanical Systems, vol. 12, no. 5, pp. 577-589, Oct. 2003.
• U. Srinivasan, M. A. Helmbrecht, R. S. Muller, and R. T. Howe, "MEMS: Some self-assembly required," Optics & Photonics News, vol. 13, no. 11, pp. 20-56, Nov. 2002.
• C. Rembe, P. Caton, R. M. White, and R. S. Muller, "Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers," Proc. SPIE - The Intl. Society for Optical Engineering, vol. 4558, pp. 108-116, Oct. 2001.
• J. M. Bustillo, R. T. Howe, and R. S. Muller, "Surface micromachining for microelectromechanical systems," Proc. IEEE, vol. 86, no. 8, pp. 1552-1574, Aug. 1998.
• M. Kiang, O. Solgaard, K. Y. Lau, and R. S. Muller, "Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning," J. Microelectromechanical Systems, vol. 7, no. 1, pp. 27-37, March 1998.
• J. W. Judy and R. S. Muller, "Magnetically actuated, addressable microstructures," J. Microelectromechanical Systems, vol. 6, no. 3, pp. 249-256, Sep. 1997.
• M. J. Daneman, N. Tien, O. Solgaard, A. Pisano, K. Y. Lau, and R. S. Muller, "Linear microvibromotor for positioning optical components," J. Microelectromechanical Systems, vol. 5, no. 3, pp. 159-165, Sep. 1996.
• Z. Calahorra, E. Minami, R. M. White, and R. S. Muller, "Reactive ion etching of indium-tin-oxide films," J. Electrochemical Society, vol. 136, no. 6, pp. 1839-1840, June 1989.
• L. Fan, Y. Tai, and R. S. Muller, "Integrated movable micromechanical structures for sensors and actuators," IEEE Trans. Electron Devices, vol. 35, no. 6, pp. 724-730, June 1988.
• D. L. Polla, R. S. Muller, and R. M. White, "Integrated multisensor chip," IEEE Electron Device Letters, vol. 7, no. 4, pp. 254-256, April 1986.
• P. Chen, R. S. Muller, R. D. Jolly, G. L. Halac, R. M. White, A. P. Andrews, T. C. Lim, and M. E. Motamedi, "Integrated silicon microbeam PI-FET accelerometer," IEEE Trans. Electron Devices, vol. 29, no. 1, pp. 27-33, Jan. 1982.
• S. Kwan, C. T. Chuang, R. S. Muller, and R. M. White, "Dual-gate depletion-mode DMOS transistor for linear gain-control application," IEEE Trans. Electron Devices, vol. 26, no. 7, pp. 1053-1058, July 1979.
• S. H. Kwan, R. S. Muller, and R. M. White, "High frequency strain transducer for acoustic wave signal processing," IEEE Trans. Electron Devices, vol. 24, no. 9, pp. 1191, Sep. 1977.

Articles in conference proceedings

• J. Van Kleef, T. Massey, P. Ledochowitsch, R. S. Muller, R. Tiefenauer, T. Blanche, H. Sato, and M. Maharbiz, "Cyborg insects, neural interfaces and other things: building interfaces between the synthetic and the multicellular," in Proceedings of the Conference on Design, Automation and Test in Europe, 2013, pp. 1546--1546.
• J. M. Rabaey, J. M. Carmena, B. Knight, D. Chen, M. Mark, R. S. Muller, S. Gambini, and S. Venkatraman, "Microscopic Wireless to Power Brain-Machine Interfaces (Keynote Address)," in Proc. CMOS Emerging Technologies Workshop, 2008.
• D. Garmire, H. Choo, R. Kant, S. govindjee, C. H. Séquin, R. S. Muller, and J. Demmel, "Diamagnetically levitated MEMS accelerometers (Poster Paper)," in 14th IEEE Intl. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2007) Digest of Technical Papers, Piscataway, NJ: IEEE Press, 2007, pp. 1203-1206.
• R. S. Muller, "Plenty of Opportunity As Well As 'Room at the Bottom' -- Some Examples in Optical MEMS (Keynote Address)," in Proc. 4th Intl. Conf. on Networked Sensing Systems (INSS 2007), Piscataway, NJ: IEEE Press, 2007, pp. 1-1.
• H. Choo, D. Garmire, J. Demmel, and R. S. Muller, "A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner," in IEEE/LEOS Optical MEMs 2005: Intl. Conf. on Optical MEMs and Their Applications, Piscataway, NJ: IEEE Press, 2005, pp. 21-22.
• D. Garmire, R. S. Muller, and J. Demmel, "Vision-based teleoperation of a Stroboscopic Microscopic Interferometric System for remote dynamic MEMS testing," in IEEE/LEOS Optical MEMs 2005: Intl. Conf. on Optical MEMs and Their Applications, Piscataway, NJ: IEEE Press, 2005, pp. 163-164.
• H. Choo and R. S. Muller, "Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology," in Proc. 2003 IEEE/LEOS Intl. Conf. on Optical MEMS, Piscataway, NJ: IEEE Press, 2003, pp. 169-170.
• K. Gupta, H. Choo, H. Kim, and R. S. Muller, "Micromachined polarization beam splitters for the visible spectrum," in Proc. 2003 IEEE/LEOS Intl. Conf. on Optical MEMS, Piscataway, NJ: IEEE Press, 2003, pp. 171-172.
• P. A. Krulevitch, P. A. Bierden, T. Bifano, E. Carr, C. E. Dimas, H. Dyson, M. A. Helmbrecht, P. Kurczynski, R. S. Muller, S. S. Olivier, Y. Peter, B. Sadoulet, O. Solgaard, and E. Yang, "MOEMS spatial light modulator development at the center for adaptive optics," in Proc. SPIE: MOEMS and Miniaturized Systems III, J. H. Smith, Ed., Vol. 4983, Bellingham, WA: SPIE, 2003, pp. 227-234.
• C. Rembe, R. Kant, M. P. Young, and R. S. Muller, "Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools," in Proc. SPIE: 5th Intl. Conf. on Vibration Measurements by Laser Techniques -- Advances and Applications, E. P. Tomasini, Ed., Vol. 4827, Bellingham, WA: SPIE, 2002, pp. 94-102.
• C. W. Chang, T. Budde, H. H. Gatzen, and R. S. Muller, "A magnetically actuated scanner for intravascular ultrasound imaging," in 2001 ASME Intl. Mechanical Engineering Congress and Exposition Technical Digest: Micro-Electro-Mechanical Systems (MEMS), New York, NY: ASME, 2001, pp. 799-804.
• R. A. Conant, J. T. Nee, K. Y. Lau, and R. S. Muller, "A flat high-frequency scanning micromirror," in Solid-State Sensor and Actuator Workshop Technical Digest, Cleveland, OH: TRF Press, 2000, pp. 6-9.
• C. Kim, A. Pisano, R. S. Muller, and M. G. Lim, "Polysilicon microgripper," in 1990 IEEE Solid-State Sensor and Actuator Workshop. Technical Digest., New York, NY: IEEE Press, 1990, pp. 48-51.
• D. L. Polla, W. T. Chang, R. S. Muller, and R. M. White, "Integrated zinc oxide-on-silicon tactile-sensor array," in Technical Digest of the 1985 IEEE International Electron Devices Meeting, Vol. 31, New York, NY: IEEE Press, 1985, pp. 133-136.
• D. L. Polla, R. S. Muller, and R. M. White, "Pyroelectric properties and applications of sputtered zinc-oxide thin films," in Proc. 1985 IEEE Ultrasonics Symp., B. R. McAvoy, Ed., New York, NY: IEEE Press, 1985, pp. 495-498.
• K. Uozumi, R. M. White, and R. S. Muller, "IDT-generated ultrasonic Lamb waves in a very thin membrane," in Proc. 1985 IEEE Ultrasonics Symp., B. R. McAvoy, Ed., New York, NY: IEEE Press, 1985, pp. 212-215.
• D. L. Polla, R. M. White, and R. S. Muller, "Integrated chemical-reaction sensor," in IEEE 1985 Intl. Conf. on Solid-State Sensors and Actuators Digest of Technical Papers (TRANSDUCERS '85 ), New York, NY: IEEE Press, 1985, pp. 33-36.
• L. S. Fan, R. M. White, and R. S. Muller, "A mutual capacitive normal- and shear-sensitive tactile sensor," in Technical Digest of the 1984 IEEE Intl. Electron Devices Meeting, Vol. 30, New York, NY: IEEE Press, 1984, pp. 220-222.
• D. L. Polla, R. S. Muller, and R. M. White, "Fully-integrated ZnO on silicon pyroelectric infrared detector array," in Technical Digest of the 1984 IEEE Intl. Electron Devices Meeting, Vol. 30, New York, NY: IEEE Press, 1984, pp. 382-384.
• D. L. Polla, R. S. Muller, and R. M. White, "Monolithic integrated zinc-oxide on silicon pyroelectric anemometer," in Technical Digest of the 1983 IEEE Intl. Electron Devices Meeting, Vol. 29, New York, NY: IEEE Press, 1983, pp. 639-642.
• P. Chen, R. Jolly, G. Halac, R. S. Muller, R. M. White, A. P. Andrews, and M. E. Motamedi, "A planar-processed PI-FET accelerometer," in 1980 IEEE Intl. Electron Devices Meeting Technical Digest, New York, NY: IEEE Press, 1980, pp. 848-849.
• P. L. Chen, R. S. Muller, R. M. White, and R. Jolly, "Thin film ZnO-MOS transducer with virtually DC response," in Proc. 1980 IEEE Ultrasonics Symp., B. R. McAvoy, Ed., New York, NY: IEEE Press, 1980, pp. 945-948.
• C. T. Chuang, R. M. White, A. Lee, P. Chen, R. S. Muller, and T. Shiosaki, "Ultrasonic receiving array having power response," in Proc. 1979 IEEE Ultrasonics Symp., J. de Klerk and B. R. McAvoy, Eds., New York, NY: IEEE Press, 1979, pp. 114-118.
• C. T. Chuang, R. M. White, T. Shiosaki, R. S. Muller, and S. H. Kwan, "Thin zinc-oxide film array for programmable filter and scanned receiving transducer," in Proc. 1979 IEEE Ultrasonics Symp., J. de Klerk and B. R. McAvoy, Eds., New York, NY: IEEE Press, 1979, pp. 915-920.
• S. Kwan, R. M. White, and R. S. Muller, "Integrated ultrasonic transducer," in Proc. 1977 IEEE Ultrasonics Symp., New York, NY: IEEE Press, 1978, pp. 843-847.

Technical Reports

• M. Hart, R. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic Interferometer System for Dynamic MEMS Characterization," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M00/18, April 2000.
• K. Williams and R. S. Muller, "Etching for Micromachining Processing," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M96/37, June 1996.
• R. Coen and R. Muller, "A Uniform channel IGFET," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M79/36, June 1979.
• J. Fiebiger and R. Muller, "An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M166, June 1966.
• R. Muller, "Report of a Visit to European Research Laboratories Active in Solid State Device Research and of the 1964 International Conference on the Physics of Semiconductors in Paris, France," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M85, July 1964.
• R. S. Muller, "Theoretical Admittance Variation With Frequency In Insulators Having Traps Subject to Charge Injection," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M54, April 1964.

Patents

• D. Garmire, H. Choo, R. S. Muller, J. Demmel, and S. Govindjee, "Integrated MEMS metrology device using complementary measuring combs," U.S. Patent 8,079,246. Dec. 2011.
• H. Choo, D. Garmire, R. S. Muller, and J. Demmel, "Method for fabricating vertically-offset interdigitated comb actuator device," U.S. Patent 7,573,022. Aug. 2009.
• H. Choo, R. S. Muller, D. Garmire, J. Demmel, and R. Kant, "MEMS-based, phase-shifting interferometer," U.S. Patent 7,564,559. July 2009.
• H. Choo and R. S. Muller, "Optical system applicable to improving the dynamic range of Shack-Hartmann sensors," U.S. Patent 7,355,793. April 2008.
• B. Behin, K. Y. Lau, and R. S. Muller, "Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam," U.S. Patent Application. Nov. 2007.
• H. Choo, D. Garmire, R. S. Muller, and J. Demmel, "CMOS-compatible high-performance microscanners, including structures, high-yield simplified fabrication methods, and applications," U.S. Patent Application. Feb. 2007.
• H. Choo and R. S. Muller, "Optical switch using frequency-based addressing in a microelectromechanical systems array," U.S. Patent Application. Nov. 2006.
• R. A. Conant, J. T. Nee, K. Lau, and R. S. Muller, "Staggered torsional electrostatic combdrive and method of forming same," U.S. Patent 7,079,299. July 2006.
• H. Choo, R. S. Muller, D. Garmire, J. Demmel, and R. Kant, "MEMS-based, phase-shifting interferometer," U.S. Patent Application. June 2006.
• B. Behin, K. Y. Lau, and R. S. Muller, "Global mechanical stop," U.S. Patent 6,962,830. Nov. 2005.
• B. Behin, K. Y. Lau, and R. S. Muller, "Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam," U.S. Patent 6,897,539. May 2005.
• R. A. Conant, J. T. Nee, K. Lau, and R. S. Muller, "Staggered torsional electrostatic combdrive and method of forming same," U.S. Patent 6,758,983. July 2004.
• J. W. Judy and R. S. Muller, "Magnetic microactuator," U.S. Patent 5,945,898. Aug. 1999.
• M. Kiang, K. Y. Lau, R. S. Muller, and O. Solgaard, "Apparatus and method for optical scanning with an oscillatory microelectromechanical system," U.S. Patent 5,867,297. Feb. 1999.
• R. S. Muller, C. H. Mastrangelo, and K. R. Williams, "Sealed micromachined vacuum and gas filled devices," U.S. Patent 5,493,177. Feb. 1996.
• R. S. Muller and C. H. Mastrangelo, "Vacuum-sealed silicon incandescent light," U.S. Patent 5,285,131. Feb. 1994.
• R. S. Muller, L. Fan, and Y. C. Tai, "Micro motors and method for their fabrication," U.S. Patent 5,252,881. Oct. 1993.
• R. S. Muller and J. I. Goicolea, "Null-detection magnetometers," U.S. Patent 4,849,695. July 1989.
• R. S. Muller and E. S. Kim, "IC processed piezoelectric microphone," U.S. Patent 4,816,125. March 1989.
• R. S. Muller and J. I. Goicolea, "Integrated-circuit one-way isolation coupler incorporating one or several carrier-domain magnetometers," U.S. Patent 4,801,883. Jan. 1989.
• R. S. Muller and E. S. Kim, "IC processed piezoelectric microphone," U.S. Patent 4,783,821. Nov. 1988.
• R. S. Muller, L. Fan, and Y. C. Tai, "Micromechanical elements and methods for their fabrication," U.S. Patent 4,740,410. April 1988.
• R. S. Muller and R. T. Howe, "Integrated circuit sensor," U.S. Patent 4,674,319. June 1987.
• R. S. Muller and D. L. Polla, "Integrated pyroelectric sensor and method," U.S. Patent 4,608,865. Sep. 1986.
• R. S. Muller and R. M. White, "Method and apparatus for sensing fluids using surface acoustic waves," U.S. Patent 4,361,026. Nov. 1982.
• R. S. Muller and L. K. Russell, "Lateral bipolar transistor for integrated circuits and method for forming the same," U.S. Patent 3,967,307. June 1976.
• L. K. Russell, T. T. Dao, and R. S. Muller, "Threshold switching integrated circuit and method for forming the same," U.S. Patent 3,943,554. March 1976.
• R. S. Muller and J. Conragan, "Integrated circuit with remotely driven switch and method," Sep. 1975.
• R. S. Muller and J. Conragan, "Integrated circuit with remotely driven switch and method," May 1973.
• R. S. Muller and J. Conragan, "Stress-strain transducer charge coupled to a piezoelectric material," U.S. Patent 3,585,415. June 1971.
• R. S. Muller and J. Conragan, "Piezoelectric-semiconductor, electromechanical transducer," U.S. Patent 3,351,786. Nov. 1967.