Patents - Nathan W. Cheung
Controlled process and resulting device
Francois J. Henley and Nathan W. Cheung
U.S. Patent 7,410,887. August 2008
Controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 7,371,660. May 2008
Method and device for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 7,348,258. March 2008
Integrated, fluorescence-detecting microanalytical system
J. Alex Chediak, Zhongsheng Luo, Timothy D. Sands, Nathan W. Cheung, Luke P. Lee and Jeonggi Seo
U.S. Patent 7,221,455. May 2007
Controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 7,160,790. January 2007
Gettering technique for wafers made using a controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,890,838. May 2005
Method and device for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,790,747. September 2004
Controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,632,724. October 2003
Controlled cleaving process using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 6,582,999. June 2003
Silicon-on-silicon hybrid wafer assembly
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,558,802. May 2003
Gettering technique for wafers made using a controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,548,382. April 2003
Method for fabricating multi-layered substrates
Nathan W. Cheung, William G. En, Sharon N. Farrens and Mikhail Korolik
U.S. Patent 6,534,381. March 2003
Controlled cleavage process and device for patterned films
Francois J. Henley and Nathan Cheung
U.S. Patent 6,528,391. March 2003
Controlled cleavage process using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 6,511,899. January 2003
Method and device for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,486,041. November 2002
Controlled cleavage process and resulting device using beta annealing
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,458,672. October 2002
Separation of thin films from transparent substrates by selective optical processing
Nathan W. Cheung, Timothy D. Sands and William S. Wong
U.S. Patent 6,420,242. July 2002
Generic layer transfer methodology by controlled cleavage process
Nathan W. Cheung and Francois J. Henley
U.S. Patent 6,391,740. May 2002
Method of separating films from bulk substrates by plasma immersion ion implantation
Nathan W. Cheung, Xiang Lu and Chenming Hu
U.S. Patent 6,344,404. February 2002
Method of forming a low temperature metal bond for use in the transfer of bulk and thin film materials
Nathan W. Cheung, Timothy David Sands and William S. Wong
U.S. Patent 6,335,263. January 2002
Controlled cleavage thin film separation process using a reusable substrate
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,335,264. January 2002
Clustertool system software using plasma immersion ion implantation
Francois J. Henley and Nathan Cheung
U.S. Patent 6,321,134. November 2001
Cleaved silicon thin film with rough surface
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,294,814. September 2001
Pre-semiconductor process implant and post-process film separation
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,291,326. September 2001
Method and device for controlled cleaving process
Francois J. Henley and Nathan Cheung
U.S. Patent 6,291,313. September 2001
Controlled cleavage process using patterning
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,290,804. September 2001
Controlled cleavage process and device for patterned films using a release layer
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,291,314. September 2001
Method and device for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,284,631. September 2001
Wafer edge engineering method and device
Francois J. Henley, Nathan Cheung, William G. Eng and Igor J. Malik
U.S. Patent 6,265,328. July 2001
Controlled cleavage process and device for patterned films using patterned implants
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,248,649. June 2001
Economical silicon-on-silicon hybrid wafer assembly
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,245,161. June 2001
Cluster tool apparatus using plasma immersion ion implantation
Francois J. Henley and Nathan Cheung
U.S. Patent 6,207,005. March 2001
Device for patterned films
Francois J. Henley and Nathan Cheung
U.S. Patent 6,187,110. February 2001
Pre-semiconductor process implant and post-process film separation
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,184,111. February 2001
Controlled cleavage process and resulting device using beta annealing
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,162,705. December 2000
Silicon-on-silicon wafer bonding process using a thin film blister-separation method
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,159,824. December 2000
Controlled cleavage thin film separation process using a reusable substrate
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,159,825. December 2000
Controlled cleavage system using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 6,155,909. December 2000
Cluster tool method using plasma immersion ion implantation
Francois J. Henley and Nathan Cheung
U.S. Patent 6,153,524. November 2000
Pressurized microbubble thin film separation process using a reusable substrate
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,146,979. November 2000
Planarizing technique for multilayered substrates
Francois J. Henley and Nathan Cheung
U.S. Patent 6,103,599. August 2000
Gettering technique for silicon-on-insulator wafers
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,083,324. July 2000
Separation of thin films from transparent substrates by selective optical processing
Nathan W. Cheung, Timothy D. Sands and William S. Wong
U.S. Patent 6,071,795. June 2000
Silicon-on-silicon hybrid wafer assembly
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,048,411. April 2000
Method for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,033,974. March 2000
Method of separating films from bulk substrates by plasma immersion ion implantation
Nathan W. Cheung, Xiang Lu and Chenming Hu
U.S. Patent 6,027,988. February 2000
Controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,013,563. January 2000
Controlled cleavage process using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 6,013,567. January 2000
Reusable substrate for thin film separation
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,010,579. January 2000
Controlled cleavage process using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 5,994,207. November 1999
Controlled cleavage process and device for patterned films
Francois J. Henley and Nathan Cheung
U.S. Patent 5,985,742. November 1999