Integrated MEMS metrology device using complementary measuring combs
David Garmire, Hyuck Choo, Richard S. Muller, James Demmel and Sanjay Govindjee
U.S. Patent 8,079,246. December 2011

Method for fabricating vertically-offset interdigitated comb actuator device
Hyuck Choo, David Garmire, Richard S. Muller and James Demmel
U.S. Patent 7,573,022. August 2009

MEMS-based, phase-shifting interferometer
Hyuck Choo, Richard S. Muller, David Garmire, James Demmel and Rishi Kant
U.S. Patent 7,564,559. July 2009

Optical system applicable to improving the dynamic range of Shack-Hartmann sensors
Hyuck Choo and Richard S. Muller
U.S. Patent 7,355,793. April 2008

Staggered torsional electrostatic combdrive and method of forming same
Robert A. Conant, Jocelyn T. Nee, Kam-Yin Lau and Richard S. Muller
U.S. Patent 7,079,299. July 2006

Global mechanical stop
Behrang Behin, Kam Yin Lau and Richard S. Muller
U.S. Patent 6,962,830. November 2005

Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam
Behrang Behin, Kam Yin Lau and Richard S. Muller
U.S. Patent 6,897,539. May 2005

Staggered torsional electrostatic combdrive and method of forming same
Robert A. Conant, Jocelyn T. Nee, Kam-Yin Lau and Richard S. Muller
U.S. Patent 6,758,983. July 2004

Magnetic microactuator
Jack W. Judy and Richard S. Muller
U.S. Patent 5,945,898. August 1999

Apparatus and method for optical scanning with an oscillatory microelectromechanical system
Meng-Hsiung Kiang, Kam Y. Lau, Richard S. Muller and Olav Solgaard
U.S. Patent 5,867,297. February 1999

Sealed micromachined vacuum and gas filled devices
Richard S. Muller, Carlos H. Mastrangelo and Kirt R. Williams
U.S. Patent 5,493,177. February 1996

Vacuum-sealed silicon incandescent light
Richard S. Muller and Carlos H. Mastrangelo
U.S. Patent 5,285,131. February 1994

Micro motors and method for their fabrication
Richard S. Muller, Longsheng Fan and Yu C. Tai
U.S. Patent 5,252,881. October 1993

Null-detection magnetometers
Richard S. Muller and Juan I. Goicolea
U.S. Patent 4,849,695. July 1989

IC processed piezoelectric microphone
Richard S. Muller and Eun S. Kim
U.S. Patent 4,816,125. March 1989

Integrated-circuit one-way isolation coupler incorporating one or several carrier-domain magnetometers
Richard S. Muller and Juan I. Goicolea
U.S. Patent 4,801,883. January 1989

IC processed piezoelectric microphone
Richard S. Muller and Eun S. Kim
U.S. Patent 4,783,821. November 1988

Micromechanical elements and methods for their fabrication
Richard S. Muller, Longsheng Fan and Yu C. Tai
U.S. Patent 4,740,410. April 1988

Integrated circuit sensor
Richard S. Muller and Roger T. Howe
U.S. Patent 4,674,319. June 1987

Integrated pyroelectric sensor and method
Richard S. Muller and Dennis L. Polla
U.S. Patent 4,608,865. September 1986

Method and apparatus for sensing fluids using surface acoustic waves
Richard S. Muller and Richard M. White
U.S. Patent 4,361,026. November 1982

Lateral bipolar transistor for integrated circuits and method for forming the same
Richard S. Muller and Lewis K. Russell
U.S. Patent 3,967,307. June 1976

Threshold switching integrated circuit and method for forming the same
Lewis K. Russell, Tich T. Dao and Richard S. Muller
U.S. Patent 3,943,554. March 1976

Stress-strain transducer charge coupled to a piezoelectric material
Richard S. Muller and James Conragan
U.S. Patent 3,585,415. June 1971

Piezoelectric-semiconductor, electromechanical transducer
Richard S. Muller and James Conragan
U.S. Patent 3,351,786. November 1967