Ruth Talcott

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M51
January 1964

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/ERL-m-51.pdf

BibTeX citation:

@techreport{Talcott:M51,
    Author = {Talcott, Ruth},
    Title = {A Resistance Heater for Semiconductor Wafer Processing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1964},
    Month = {Jan},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/28807.html},
    Number = {UCB/ERL M51}
}

EndNote citation:

%0 Report
%A Talcott, Ruth
%T A Resistance Heater for Semiconductor Wafer Processing
%I EECS Department, University of California, Berkeley
%D 1964
%@ UCB/ERL M51
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/28807.html
%F Talcott:M51