Ruth Talcott

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M51

, 1964

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/ERL-m-51.pdf

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BibTeX citation:

@techreport{Talcott:M51,
    Author= {Talcott, Ruth},
    Title= {A Resistance Heater for Semiconductor Wafer Processing},
    Year= {1964},
    Month= {Jan},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/28807.html},
    Number= {UCB/ERL M51},
}

EndNote citation:

%0 Report
%A Talcott, Ruth 
%T A Resistance Heater for Semiconductor Wafer Processing
%I EECS Department, University of California, Berkeley
%D 1964
%@ UCB/ERL M51
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/28807.html
%F Talcott:M51