Certain Semiconductor Application of the Scanning Electron Microscope

T.E. Everhart

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M100
October 1964

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/ERL-m-100.pdf

BibTeX citation:

@techreport{Everhart:M100,
    Author = {Everhart, T.E.},
    Title = {Certain Semiconductor Application of the Scanning Electron Microscope},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1964},
    Month = {Oct},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/29127.html},
    Number = {UCB/ERL M100}
}

EndNote citation:

%0 Report
%A Everhart, T.E.
%T Certain Semiconductor Application of the Scanning Electron Microscope
%I EECS Department, University of California, Berkeley
%D 1964
%@ UCB/ERL M100
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1964/29127.html
%F Everhart:M100