An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers

J.R. Fiebiger and R.S. Muller

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M166

1966

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/Archive/ERL-m-166.pdf

BibTeX citation:

@techreport{Fiebiger:M166,
    Author= {Fiebiger, J.R. and Muller, R.S.},
    Title= {An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers},
    Year= {1966},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/29371.html},
    Number= {UCB/ERL M166},
}

EndNote citation:

%0 Report
%A Fiebiger, J.R. 
%A Muller, R.S. 
%T An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers
%I EECS Department, University of California, Berkeley
%D 1966
%@ UCB/ERL M166
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/29371.html
%F Fiebiger:M166