An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers

J.R. Fiebiger and R.S. Muller

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M166
June 1966

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/ERL-m-166.pdf


BibTeX citation:

@techreport{Fiebiger:M166,
    Author = {Fiebiger, J.R. and Muller, R.S.},
    Title = {An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1966},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/29371.html},
    Number = {UCB/ERL M166}
}

EndNote citation:

%0 Report
%A Fiebiger, J.R.
%A Muller, R.S.
%T An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers
%I EECS Department, University of California, Berkeley
%D 1966
%@ UCB/ERL M166
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/29371.html
%F Fiebiger:M166