An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers
J.R. Fiebiger and R.S. Muller
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M166
1966
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/ERL-m-166.pdf
BibTeX citation:
@techreport{Fiebiger:M166,
Author= {Fiebiger, J.R. and Muller, R.S.},
Title= {An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers},
Year= {1966},
Month= {Jun},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/29371.html},
Number= {UCB/ERL M166},
}
EndNote citation:
%0 Report %A Fiebiger, J.R. %A Muller, R.S. %T An Evaluation of Vacuum Deposited Metal- Insulator-Piezoelectric Semiconductor (MIPS) Electromechanical Transducers %I EECS Department, University of California, Berkeley %D 1966 %@ UCB/ERL M166 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1966/29371.html %F Fiebiger:M166