Scanning Electron Mircoscope Investigation of Planar Diffused P-N Junction Profiles Near the Edge of a Diffusion Mask
N.C. MacDonald and T.E. Everhart
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M199
, 1967
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1967/ERL-m-199.pdf
BibTeX citation:
@techreport{MacDonald:M199, Author= {MacDonald, N.C. and Everhart, T.E.}, Title= {Scanning Electron Mircoscope Investigation of Planar Diffused P-N Junction Profiles Near the Edge of a Diffusion Mask}, Year= {1967}, Month= {Jan}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1967/29248.html}, Number= {UCB/ERL M199}, }
EndNote citation:
%0 Report %A MacDonald, N.C. %A Everhart, T.E. %T Scanning Electron Mircoscope Investigation of Planar Diffused P-N Junction Profiles Near the Edge of a Diffusion Mask %I EECS Department, University of California, Berkeley %D 1967 %@ UCB/ERL M199 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1967/29248.html %F MacDonald:M199