Scanning Electron Mircoscope Investigation of Planar Diffused P-N Junction Profiles Near the Edge of a Diffusion Mask

N.C. MacDonald and T.E. Everhart

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M199
January 1967

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1967/ERL-m-199.pdf

BibTeX citation:

@techreport{MacDonald:M199,
    Author = {MacDonald, N.C. and Everhart, T.E.},
    Title = {Scanning Electron Mircoscope Investigation of Planar Diffused P-N Junction Profiles Near the Edge of a Diffusion Mask},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1967},
    Month = {Jan},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1967/29248.html},
    Number = {UCB/ERL M199}
}

EndNote citation:

%0 Report
%A MacDonald, N.C.
%A Everhart, T.E.
%T Scanning Electron Mircoscope Investigation of Planar Diffused P-N Junction Profiles Near the Edge of a Diffusion Mask
%I EECS Department, University of California, Berkeley
%D 1967
%@ UCB/ERL M199
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1967/29248.html
%F MacDonald:M199