A.R. Neureuther

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M77/43

, 1977

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1977/ERL-m-77-43.pdf

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BibTeX citation:

@techreport{Neureuther:M77/43,
    Author= {Neureuther, A.R.},
    Title= {Simulation of X-Ray Resist Line Edge Profiles},
    Year= {1977},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1977/28896.html},
    Number= {UCB/ERL M77/43},
}

EndNote citation:

%0 Report
%A Neureuther, A.R. 
%T Simulation of X-Ray Resist Line Edge Profiles
%I EECS Department, University of California, Berkeley
%D 1977
%@ UCB/ERL M77/43
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1977/28896.html
%F Neureuther:M77/43