Report on the Design of a Simulator Program (SAMPLE) for IC Fabrication

Sharad Narayan Nandgaonkar

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M79/16
June 1978

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/ERL-m-79-16.pdf

In the fabrication of Integrated Circuits a major step is to etch out a particular geometric pattern from a mask onto a semiconductor wafer. This report describes the present state of an user-oriented simulation program (SAMPLE), developed at UCB, to aid in this process as a whole.

The program is based on a model of the process, closely parallelling the real one, as a sequence of operations performed on the photoresist coated wafer by various machines. An user-interface allows the user to interact with these simulated machines and processes using some simple input statements. The overall design and implementation details of the user-interface and the simulated lab are presented, along with the information for using it.

BibTeX citation:

@techreport{Nandgaonkar:M79/16,
    Author = {Nandgaonkar, Sharad Narayan},
    Title = {Report on the Design of a Simulator Program (SAMPLE) for IC Fabrication},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1978},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/9606.html},
    Number = {UCB/ERL M79/16},
    Abstract = {In the fabrication of Integrated Circuits a major step is to etch
out a particular geometric pattern from a mask onto a semiconductor
wafer.  This report describes the present state of an user-oriented
simulation program (SAMPLE), developed at UCB, to aid in this
process as a whole.

The program is based on a model of the process, closely parallelling
the real one, as a sequence of operations performed on the
photoresist coated wafer by various machines.  An user-interface
allows the user to interact with these simulated machines and
processes using some simple input statements.  The overall design
and implementation details of the user-interface and the simulated
lab are presented, along with the information for using it.}
}

EndNote citation:

%0 Report
%A Nandgaonkar, Sharad Narayan
%T Report on the Design of a Simulator Program (SAMPLE) for IC Fabrication
%I EECS Department, University of California, Berkeley
%D 1978
%@ UCB/ERL M79/16
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/9606.html
%F Nandgaonkar:M79/16