Sharad Narayan Nandgaonkar

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M79/16

, 1978

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/ERL-m-79-16.pdf

In the fabrication of Integrated Circuits a major step is to etch out a particular geometric pattern from a mask onto a semiconductor wafer. This report describes the present state of an user-oriented simulation program (SAMPLE), developed at UCB, to aid in this process as a whole.

The program is based on a model of the process, closely parallelling the real one, as a sequence of operations performed on the photoresist coated wafer by various machines. An user-interface allows the user to interact with these simulated machines and processes using some simple input statements. The overall design and implementation details of the user-interface and the simulated lab are presented, along with the information for using it.

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BibTeX citation:

@techreport{Nandgaonkar:M79/16,
    Author= {Nandgaonkar, Sharad Narayan},
    Title= {Report on the Design of a Simulator Program (SAMPLE) for IC Fabrication},
    Year= {1978},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/9606.html},
    Number= {UCB/ERL M79/16},
    Abstract= {In the fabrication of Integrated Circuits a major step is to etch
out a particular geometric pattern from a mask onto a semiconductor
wafer.  This report describes the present state of an user-oriented
simulation program (SAMPLE), developed at UCB, to aid in this
process as a whole.

The program is based on a model of the process, closely parallelling
the real one, as a sequence of operations performed on the
photoresist coated wafer by various machines.  An user-interface
allows the user to interact with these simulated machines and
processes using some simple input statements.  The overall design
and implementation details of the user-interface and the simulated
lab are presented, along with the information for using it.},
}

EndNote citation:

%0 Report
%A Nandgaonkar, Sharad Narayan 
%T Report on the Design of a Simulator Program (SAMPLE) for IC Fabrication
%I EECS Department, University of California, Berkeley
%D 1978
%@ UCB/ERL M79/16
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/9606.html
%F Nandgaonkar:M79/16