Michael M. O'Toole

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M79/42

, 1979

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1979/ERL-m-79-42.pdf

Advisors: Andrew R. Neureuther

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BibTeX citation:

@phdthesis{O'Toole:M79/42,
    Author= {O'Toole, Michael M.},
    Title= {Simulation of Optically Formed Image Profiles in Positive Photoresist},
    School= {EECS Department, University of California, Berkeley},
    Year= {1979},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1979/8365.html},
    Number= {UCB/ERL M79/42},
}

EndNote citation:

%0 Thesis
%A O'Toole, Michael M. 
%T Simulation of Optically Formed Image Profiles in Positive Photoresist
%I EECS Department, University of California, Berkeley
%D 1979
%@ UCB/ERL M79/42
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1979/8365.html
%F O'Toole:M79/42