Integrated Silicon Microbeam PI-FET Accelerometer
Pau-Ling Chen
EECS Department, University of California, Berkeley
1982
Advisors: Richard S. Muller
BibTeX citation:
@phdthesis{Chen:7580, Author= {Chen, Pau-Ling}, Title= {Integrated Silicon Microbeam PI-FET Accelerometer}, School= {EECS Department, University of California, Berkeley}, Year= {1982}, }
EndNote citation:
%0 Thesis %A Chen, Pau-Ling %T Integrated Silicon Microbeam PI-FET Accelerometer %I EECS Department, University of California, Berkeley %D 1982 %F Chen:7580