Local Oxidation Process for Very Large Scale Integrated Circuits
Chi-Hung Hui
EECS Department, University of California, Berkeley
1983
Advisors: William G. Oldham
BibTeX citation:
@phdthesis{Hui:7604, Author= {Hui, Chi-Hung}, Title= {Local Oxidation Process for Very Large Scale Integrated Circuits}, School= {EECS Department, University of California, Berkeley}, Year= {1983}, }
EndNote citation:
%0 Thesis %A Hui, Chi-Hung %T Local Oxidation Process for Very Large Scale Integrated Circuits %I EECS Department, University of California, Berkeley %D 1983 %F Hui:7604