Investigation of Silicon Nitride Formed by Low-Energy Ion-Implantation
Tzu-Yin Chiu
EECS Department, University of California, Berkeley
1983
Advisors: William G. Oldham
BibTeX citation:
@phdthesis{Chiu:7632, Author= {Chiu, Tzu-Yin}, Title= {Investigation of Silicon Nitride Formed by Low-Energy Ion-Implantation}, School= {EECS Department, University of California, Berkeley}, Year= {1983}, }
EndNote citation:
%0 Thesis %A Chiu, Tzu-Yin %T Investigation of Silicon Nitride Formed by Low-Energy Ion-Implantation %I EECS Department, University of California, Berkeley %D 1983 %F Chiu:7632