Analysis of Backscattered Electron Signals for X-ray Mask Inspection

Michael G. Rosenfield

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/16
January 1984

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/ERL-m-84-16.pdf

Advisor: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Rosenfield:M84/16,
    Author = {Rosenfield, Michael G.},
    Title = {Analysis of Backscattered Electron Signals for X-ray Mask Inspection},
    School = {EECS Department, University of California, Berkeley},
    Year = {1984},
    Month = {Jan},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/270.html},
    Number = {UCB/ERL M84/16}
}

EndNote citation:

%0 Thesis
%A Rosenfield, Michael G.
%T Analysis of Backscattered Electron Signals for X-ray Mask Inspection
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/16
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/270.html
%F Rosenfield:M84/16