Michael G. Rosenfield

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M84/16

, 1984

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/ERL-m-84-16.pdf

Advisors: Andrew R. Neureuther

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BibTeX citation:

@phdthesis{Rosenfield:M84/16,
    Author= {Rosenfield, Michael G.},
    Title= {Analysis of Backscattered Electron Signals for X-ray Mask Inspection},
    School= {EECS Department, University of California, Berkeley},
    Year= {1984},
    Month= {Jan},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/270.html},
    Number= {UCB/ERL M84/16},
}

EndNote citation:

%0 Thesis
%A Rosenfield, Michael G. 
%T Analysis of Backscattered Electron Signals for X-ray Mask Inspection
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/16
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/270.html
%F Rosenfield:M84/16