Deok J. Kim

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M84/65

, 1984

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/ERL-m-84-65.pdf

Advisors: William G. Oldham

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BibTeX citation:

@phdthesis{Kim:M84/65,
    Author= {Kim, Deok J.},
    Title= {Characterization and Modeling of Positive Photoresist},
    School= {EECS Department, University of California, Berkeley},
    Year= {1984},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/360.html},
    Number= {UCB/ERL M84/65},
}

EndNote citation:

%0 Thesis
%A Kim, Deok J. 
%T Characterization and Modeling of Positive Photoresist
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/65
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/360.html
%F Kim:M84/65