Electron Beam Lithography for Josephson Junction Fabrication
N.K.L. Raja
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M84/82
, 1984
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/ERL-m-84-82.pdf
BibTeX citation:
@techreport{Raja:M84/82, Author= {Raja, N.K.L.}, Title= {Electron Beam Lithography for Josephson Junction Fabrication}, Year= {1984}, Month= {Sep}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html}, Number= {UCB/ERL M84/82}, }
EndNote citation:
%0 Report %A Raja, N.K.L. %T Electron Beam Lithography for Josephson Junction Fabrication %I EECS Department, University of California, Berkeley %D 1984 %@ UCB/ERL M84/82 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html %F Raja:M84/82