Modeling Lift-Off Deposition

L. Winemberg

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/112
December 1984

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/ERL-m-84-112.pdf

The effects of tooling and resist parameters on the lift-off metallization process are investigated and modeled through computer simulation with extensions to the SAMPLE program. Also, simple equations are proposed for predicting resist and tooling effects on the final metal profile. The formation of metal "feet" resulting from the deposition of metal on the resist sidewalls is used to judge the quality of the lift-off process. Using the height of the metal foot as a figure of merit, simulation studies and the proposed equations are used to establish design guidelines for lift-off metallization. Through the use of these guidelines, the proper balance between the tooling configuration and the resist profile necessary for a successful lift-off process can be found.

BibTeX citation:

@techreport{Winemberg:M84/112,
    Author = {Winemberg, L.},
    Title = {Modeling Lift-Off Deposition},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1984},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/437.html},
    Number = {UCB/ERL M84/112},
    Abstract = {The effects of tooling and resist parameters on the lift-off
metallization process are investigated and modeled through
computer simulation with extensions to the SAMPLE program.  Also,
simple equations are proposed for predicting resist and tooling
effects on the final metal profile.  The formation of metal "feet"
resulting from the deposition of metal on the resist sidewalls
is used to judge the quality of the lift-off process.  Using the
height of the metal foot as a figure of merit, simulation studies
and the proposed equations are used to establish design guidelines
for lift-off metallization.  Through the use of these guidelines,
the proper balance between the tooling configuration and the resist
profile necessary for a successful lift-off process can be found.}
}

EndNote citation:

%0 Report
%A Winemberg, L.
%T Modeling Lift-Off Deposition
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/112
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/437.html
%F Winemberg:M84/112