Synchronous Electron Beam Diagnostic for Plasma Etching Discharges

C.P. Chang and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M85/38

1985

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/Archive/ERL-85-38.pdf

BibTeX citation:

@techreport{Chang:M85/38,
    Author= {Chang, C.P. and Lieberman, Michael A.},
    Title= {Synchronous Electron Beam Diagnostic for Plasma Etching Discharges},
    Year= {1985},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/504.html},
    Number= {UCB/ERL M85/38},
}

EndNote citation:

%0 Report
%A Chang, C.P. 
%A Lieberman, Michael A. 
%T Synchronous Electron Beam Diagnostic for Plasma Etching Discharges
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/38
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/504.html
%F Chang:M85/38