G.M. Atkinson

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M85/51

, 1985

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/ERL-85-51.pdf

---

BibTeX citation:

@techreport{Atkinson:M85/51,
    Author= {Atkinson, G.M.},
    Title= {Simulation of Developed Resist Profiles for Masked Ion Beam Lithography (MIBL)},
    Year= {1985},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/527.html},
    Number= {UCB/ERL M85/51},
}

EndNote citation:

%0 Report
%A Atkinson, G.M. 
%T Simulation of Developed Resist Profiles for Masked Ion Beam Lithography (MIBL)
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/51
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/527.html
%F Atkinson:M85/51