Wingyu Leung
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M85/76
September 1985
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/ERL-85-76.pdf
Advisor: Andrew R. Neureuther
BibTeX citation:
@phdthesis{Leung:M85/76, Author = {Leung, Wingyu}, Title = {Characterization of Inorganic Resist for VLSI Fabrication}, School = {EECS Department, University of California, Berkeley}, Year = {1985}, Month = {Sep}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/564.html}, Number = {UCB/ERL M85/76} }
EndNote citation:
%0 Thesis %A Leung, Wingyu %T Characterization of Inorganic Resist for VLSI Fabrication %I EECS Department, University of California, Berkeley %D 1985 %@ UCB/ERL M85/76 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/564.html %F Leung:M85/76