Characterization of Inorganic Resist for VLSI Fabrication

Wingyu Leung

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M85/76

1985

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/Archive/ERL-85-76.pdf

Advisors: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Leung:M85/76,
    Author= {Leung, Wingyu},
    Title= {Characterization of Inorganic Resist for VLSI Fabrication},
    School= {EECS Department, University of California, Berkeley},
    Year= {1985},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/564.html},
    Number= {UCB/ERL M85/76},
}

EndNote citation:

%0 Thesis
%A Leung, Wingyu 
%T Characterization of Inorganic Resist for VLSI Fabrication
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/76
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/564.html
%F Leung:M85/76