Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process
J.E. Van Leeuwen
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M86/17
, 1986
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1986/ERL-86-17.pdf
BibTeX citation:
@techreport{Van Leeuwen:M86/17, Author= {Van Leeuwen, J.E.}, Title= {Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process}, Year= {1986}, Month= {Feb}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1986/655.html}, Number= {UCB/ERL M86/17}, }
EndNote citation:
%0 Report %A Van Leeuwen, J.E. %T Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process %I EECS Department, University of California, Berkeley %D 1986 %@ UCB/ERL M86/17 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1986/655.html %F Van Leeuwen:M86/17