R. Alley and P.K. Ko and K. Voros

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M86/75

, 1986

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1986/ERL-86-75.pdf

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BibTeX citation:

@techreport{Alley:M86/75,
    Author= {Alley, R. and Ko, P.K. and Voros, K.},
    Title= {Characterization of the Boron+ Planar Dopant Source Moisture Enhanced Process},
    Year= {1986},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1986/753.html},
    Number= {UCB/ERL M86/75},
}

EndNote citation:

%0 Report
%A Alley, R. 
%A Ko, P.K. 
%A Voros, K. 
%T Characterization of the Boron+ Planar Dopant Source Moisture Enhanced Process
%I EECS Department, University of California, Berkeley
%D 1986
%@ UCB/ERL M86/75
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1986/753.html
%F Alley:M86/75