V. Mastromarco

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M87/40

, 1987

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/ERL-87-40.pdf

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BibTeX citation:

@techreport{Mastromarco:M87/40,
    Author= {Mastromarco, V.},
    Title= {Printability of Defects in Optical Lithography: Polarity and Critical Location Effects},
    Year= {1987},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/900.html},
    Number= {UCB/ERL M87/40},
}

EndNote citation:

%0 Report
%A Mastromarco, V. 
%T Printability of Defects in Optical Lithography: Polarity and Critical Location Effects
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/40
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/900.html
%F Mastromarco:M87/40