Analytical Solution for Capacitive R.F. Sheath

Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M87/71

1987

This publication is archived. It is kept only for reference purposes, so it is no longer being updated and may not meet accessibility standards. If you need this content in a different format, please email webteam@eecs.berkeley.edu.

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/Archive/ERL-87-71.pdf

BibTeX citation:

@techreport{Lieberman:M87/71,
    Author= {Lieberman, Michael A.},
    Title= {Analytical Solution for Capacitive R.F. Sheath},
    Year= {1987},
    Month= {Feb},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/945.html},
    Number= {UCB/ERL M87/71},
}

EndNote citation:

%0 Report
%A Lieberman, Michael A. 
%T Analytical Solution for Capacitive R.F. Sheath
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/71
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/945.html
%F Lieberman:M87/71