Analytical Solution for Capacitive R.F. Sheath
Michael A. Lieberman
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M87/71
, 1987
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/ERL-87-71.pdf
BibTeX citation:
@techreport{Lieberman:M87/71, Author= {Lieberman, Michael A.}, Title= {Analytical Solution for Capacitive R.F. Sheath}, Year= {1987}, Month= {Feb}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/945.html}, Number= {UCB/ERL M87/71}, }
EndNote citation:
%0 Report %A Lieberman, Michael A. %T Analytical Solution for Capacitive R.F. Sheath %I EECS Department, University of California, Berkeley %D 1987 %@ UCB/ERL M87/71 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/945.html %F Lieberman:M87/71