C. Zee

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M88/11

, 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-11.pdf

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BibTeX citation:

@techreport{Zee:M88/11,
    Author= {Zee, C.},
    Title= {Characterization and Modeling of Resist Development with Surfactants},
    Year= {1988},
    Month= {Jan},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1005.html},
    Number= {UCB/ERL M88/11},
}

EndNote citation:

%0 Report
%A Zee, C. 
%T Characterization and Modeling of Resist Development with Surfactants
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/11
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1005.html
%F Zee:M88/11