Pantas Sutardja

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M88/26

, 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-26.pdf

Advisors: William G. Oldham

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BibTeX citation:

@phdthesis{Sutardja:M88/26,
    Author= {Sutardja, Pantas},
    Title= {Finite Element Methods for Process Simulation Application to Silicon Oxidation},
    School= {EECS Department, University of California, Berkeley},
    Year= {1988},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1030.html},
    Number= {UCB/ERL M88/26},
}

EndNote citation:

%0 Thesis
%A Sutardja, Pantas 
%T Finite Element Methods for Process Simulation Application to Silicon Oxidation
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/26
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1030.html
%F Sutardja:M88/26