Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges
C.G. Goedde and Allan J. Lichtenberg and Michael A. Lieberman
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M88/29
, 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-29.pdf
BibTeX citation:
@techreport{Goedde:M88/29, Author= {Goedde, C.G. and Lichtenberg, Allan J. and Lieberman, Michael A.}, Title= {Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges}, Year= {1988}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1034.html}, Number= {UCB/ERL M88/29}, }
EndNote citation:
%0 Report %A Goedde, C.G. %A Lichtenberg, Allan J. %A Lieberman, Michael A. %T Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/29 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1034.html %F Goedde:M88/29