N.N.S. Tam

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M88/32

, 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-32.pdf

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BibTeX citation:

@techreport{Tam:M88/32,
    Author= {Tam, N.N.S.},
    Title= {Characterization of Electron-Beam-Exposed Negative Resists},
    Year= {1988},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1039.html},
    Number= {UCB/ERL M88/32},
}

EndNote citation:

%0 Report
%A Tam, N.N.S. 
%T Characterization of Electron-Beam-Exposed Negative Resists
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/32
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1039.html
%F Tam:M88/32