Characterization of Electron-Beam-Exposed Negative Resists

N.N.S. Tam

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/32
May 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-32.pdf

BibTeX citation:

@techreport{Tam:M88/32,
    Author = {Tam, N.N.S.},
    Title = {Characterization of Electron-Beam-Exposed Negative Resists},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1039.html},
    Number = {UCB/ERL M88/32}
}

EndNote citation:

%0 Report
%A Tam, N.N.S.
%T Characterization of Electron-Beam-Exposed Negative Resists
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/32
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1039.html
%F Tam:M88/32