J. Fleischman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M88/60

, 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-60.pdf

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BibTeX citation:

@techreport{Fleischman:M88/60,
    Author= {Fleischman, J.},
    Title= {Electrical Probing of Test Structures for Optical Lithography},
    Year= {1988},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1098.html},
    Number= {UCB/ERL M88/60},
}

EndNote citation:

%0 Report
%A Fleischman, J. 
%T Electrical Probing of Test Structures for Optical Lithography
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/60
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1098.html
%F Fleischman:M88/60