J. Fleischman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/60
September 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-60.pdf
BibTeX citation:
@techreport{Fleischman:M88/60, Author = {Fleischman, J.}, Title = {Electrical Probing of Test Structures for Optical Lithography}, Institution = {EECS Department, University of California, Berkeley}, Year = {1988}, Month = {Sep}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1098.html}, Number = {UCB/ERL M88/60} }
EndNote citation:
%0 Report %A Fleischman, J. %T Electrical Probing of Test Structures for Optical Lithography %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/60 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1098.html %F Fleischman:M88/60