Spin Coating Simulation Using Finite Element Method

R. Sutardja

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/70
November 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-70.pdf

BibTeX citation:

@techreport{Sutardja:M88/70,
    Author = {Sutardja, R.},
    Title = {Spin Coating Simulation Using Finite Element Method},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    Month = {Nov},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1117.html},
    Number = {UCB/ERL M88/70}
}

EndNote citation:

%0 Report
%A Sutardja, R.
%T Spin Coating Simulation Using Finite Element Method
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/70
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1117.html
%F Sutardja:M88/70