R. Sutardja

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M88/70

, 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-70.pdf

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BibTeX citation:

@techreport{Sutardja:M88/70,
    Author= {Sutardja, R.},
    Title= {Spin Coating Simulation Using Finite Element Method},
    Year= {1988},
    Month= {Nov},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1117.html},
    Number= {UCB/ERL M88/70},
}

EndNote citation:

%0 Report
%A Sutardja, R. 
%T Spin Coating Simulation Using Finite Element Method
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/70
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1117.html
%F Sutardja:M88/70