An Experimental Characterization System for Deep Ultra-Violet (UV) Photoresists

D.M. Drako

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/84
December 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-84.pdf

BibTeX citation:

@techreport{Drako:M88/84,
    Author = {Drako, D.M.},
    Title = {An Experimental Characterization System for Deep Ultra-Violet (UV) Photoresists},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1141.html},
    Number = {UCB/ERL M88/84}
}

EndNote citation:

%0 Report
%A Drako, D.M.
%T An Experimental Characterization System for Deep Ultra-Violet (UV) Photoresists
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/84
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1141.html
%F Drako:M88/84