D.M. Drako

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M88/84

, 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-84.pdf

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BibTeX citation:

@techreport{Drako:M88/84,
    Author= {Drako, D.M.},
    Title= {An Experimental Characterization System for Deep Ultra-Violet (UV) Photoresists},
    Year= {1988},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1141.html},
    Number= {UCB/ERL M88/84},
}

EndNote citation:

%0 Report
%A Drako, D.M. 
%T An Experimental Characterization System for Deep Ultra-Violet (UV) Photoresists
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/84
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1141.html
%F Drako:M88/84