D.M. Drako
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/84
December 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-84.pdf
BibTeX citation:
@techreport{Drako:M88/84, Author = {Drako, D.M.}, Title = {An Experimental Characterization System for Deep Ultra-Violet (UV) Photoresists}, Institution = {EECS Department, University of California, Berkeley}, Year = {1988}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1141.html}, Number = {UCB/ERL M88/84} }
EndNote citation:
%0 Report %A Drako, D.M. %T An Experimental Characterization System for Deep Ultra-Violet (UV) Photoresists %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/84 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1141.html %F Drako:M88/84