Macroscopic Modelling of R.F. Plasma Discharges
G.R. Misium and Allan J. Lichtenberg and Michael A. Lieberman
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M88/86
, 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-86.pdf
BibTeX citation:
@techreport{Misium:M88/86, Author= {Misium, G.R. and Lichtenberg, Allan J. and Lieberman, Michael A.}, Title= {Macroscopic Modelling of R.F. Plasma Discharges}, Year= {1988}, Month= {Aug}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1143.html}, Number= {UCB/ERL M88/86}, }
EndNote citation:
%0 Report %A Misium, G.R. %A Lichtenberg, Allan J. %A Lieberman, Michael A. %T Macroscopic Modelling of R.F. Plasma Discharges %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/86 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1143.html %F Misium:M88/86