Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M87/65

, 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-87-65.pdf

---

BibTeX citation:

@techreport{Lieberman:M87/65,
    Author= {Lieberman, Michael A.},
    Title= {Basic RF Discharge Model},
    Year= {1988},
    Month= {Jan},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/937.html},
    Number= {UCB/ERL M87/65},
}

EndNote citation:

%0 Report
%A Lieberman, Michael A. 
%T Basic RF Discharge Model
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M87/65
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/937.html
%F Lieberman:M87/65