Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/65
January 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-87-65.pdf
BibTeX citation:
@techreport{Lieberman:M87/65, Author = {Lieberman, Michael A.}, Title = {Basic RF Discharge Model}, Institution = {EECS Department, University of California, Berkeley}, Year = {1988}, Month = {Jan}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/937.html}, Number = {UCB/ERL M87/65} }
EndNote citation:
%0 Report %A Lieberman, Michael A. %T Basic RF Discharge Model %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M87/65 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/937.html %F Lieberman:M87/65