Basic RF Discharge Model

Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/65
January 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-87-65.pdf

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BibTeX citation:

@techreport{Lieberman:M87/65,
    Author = {Lieberman, Michael A.},
    Title = {Basic RF Discharge Model},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    Month = {Jan},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/937.html},
    Number = {UCB/ERL M87/65}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%T Basic RF Discharge Model
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M87/65
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/937.html
%F Lieberman:M87/65