Axial Distribution of Optical Emission in a Planar Magnetron
L. Gu and Michael A. Lieberman
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M88/6
, 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-6.pdf
BibTeX citation:
@techreport{Gu:M88/6, Author= {Gu, L. and Lieberman, Michael A.}, Title= {Axial Distribution of Optical Emission in a Planar Magnetron}, Year= {1988}, Month= {Jan}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/999.html}, Number= {UCB/ERL M88/6}, }
EndNote citation:
%0 Report %A Gu, L. %A Lieberman, Michael A. %T Axial Distribution of Optical Emission in a Planar Magnetron %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/6 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/999.html %F Gu:M88/6