E.W. Scheckler

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M89/27

, 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-27.pdf

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BibTeX citation:

@techreport{Scheckler:M89/27,
    Author= {Scheckler, E.W.},
    Title= {Extraction of Topography Dependent Electrical Characteristics from Process Simulation Using SIMPL, with Application to Planarization and Dense Interconnect Technologies},
    Year= {1989},
    Month= {Mar},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1189.html},
    Number= {UCB/ERL M89/27},
}

EndNote citation:

%0 Report
%A Scheckler, E.W. 
%T Extraction of Topography Dependent Electrical Characteristics from Process Simulation Using SIMPL, with Application to Planarization and Dense Interconnect Technologies
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/27
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1189.html
%F Scheckler:M89/27