Extraction of Topography Dependent Electrical Characteristics from Process Simulation Using SIMPL, with Application to Planarization and Dense Interconnect Technologies

E.W. Scheckler

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/27
March 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-27.pdf

BibTeX citation:

@techreport{Scheckler:M89/27,
    Author = {Scheckler, E.W.},
    Title = {Extraction of Topography Dependent Electrical Characteristics from Process Simulation Using SIMPL, with Application to Planarization and Dense Interconnect Technologies},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    Month = {Mar},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1189.html},
    Number = {UCB/ERL M89/27}
}

EndNote citation:

%0 Report
%A Scheckler, E.W.
%T Extraction of Topography Dependent Electrical Characteristics from Process Simulation Using SIMPL, with Application to Planarization and Dense Interconnect Technologies
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/27
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1189.html
%F Scheckler:M89/27