Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M89/30

, 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-30.pdf

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BibTeX citation:

@techreport{Lieberman:M89/30,
    Author= {Lieberman, Michael A.},
    Title= {Model of Plasma Immersion Ion Implantation},
    Year= {1989},
    Month= {Mar},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1195.html},
    Number= {UCB/ERL M89/30},
}

EndNote citation:

%0 Report
%A Lieberman, Michael A. 
%T Model of Plasma Immersion Ion Implantation
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/30
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1195.html
%F Lieberman:M89/30