Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/30
March 1989
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-30.pdf
BibTeX citation:
@techreport{Lieberman:M89/30, Author = {Lieberman, Michael A.}, Title = {Model of Plasma Immersion Ion Implantation}, Institution = {EECS Department, University of California, Berkeley}, Year = {1989}, Month = {Mar}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1195.html}, Number = {UCB/ERL M89/30} }
EndNote citation:
%0 Report %A Lieberman, Michael A. %T Model of Plasma Immersion Ion Implantation %I EECS Department, University of California, Berkeley %D 1989 %@ UCB/ERL M89/30 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1195.html %F Lieberman:M89/30