W.N. Partlo

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M89/68

, 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-68.pdf

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BibTeX citation:

@techreport{Partlo:M89/68,
    Author= {Partlo, W.N.},
    Title= {Effects of Excimer Laser Radiation Properties on Condenser Illumination for Microlithography},
    Year= {1989},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1253.html},
    Number= {UCB/ERL M89/68},
}

EndNote citation:

%0 Report
%A Partlo, W.N. 
%T Effects of Excimer Laser Radiation Properties on Condenser Illumination for Microlithography
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/68
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1253.html
%F Partlo:M89/68