D.E. Lyons

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M89/75

, 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-75.pdf

---

BibTeX citation:

@techreport{Lyons:M89/75,
    Author= {Lyons, D.E.},
    Title= {Planar Multilevel Metallization Using Additive Pattern Transfer},
    Year= {1989},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1264.html},
    Number= {UCB/ERL M89/75},
}

EndNote citation:

%0 Report
%A Lyons, D.E. 
%T Planar Multilevel Metallization Using Additive Pattern Transfer
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/75
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1264.html
%F Lyons:M89/75