D.E. Lyons
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/75
June 1989
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-75.pdf
BibTeX citation:
@techreport{Lyons:M89/75, Author = {Lyons, D.E.}, Title = {Planar Multilevel Metallization Using Additive Pattern Transfer}, Institution = {EECS Department, University of California, Berkeley}, Year = {1989}, Month = {Jun}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1264.html}, Number = {UCB/ERL M89/75} }
EndNote citation:
%0 Report %A Lyons, D.E. %T Planar Multilevel Metallization Using Additive Pattern Transfer %I EECS Department, University of California, Berkeley %D 1989 %@ UCB/ERL M89/75 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1264.html %F Lyons:M89/75