Test Structures for N-Level Metal

D.M. Drako and D.E. Lyons

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/76
June 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-76.pdf

BibTeX citation:

@techreport{Drako:M89/76,
    Author = {Drako, D.M. and Lyons, D.E.},
    Title = {Test Structures for N-Level Metal},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1265.html},
    Number = {UCB/ERL M89/76}
}

EndNote citation:

%0 Report
%A Drako, D.M.
%A Lyons, D.E.
%T Test Structures for N-Level Metal
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/76
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1265.html
%F Drako:M89/76