Test Structures for N-Level Metal
D.M. Drako and D.E. Lyons
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M89/76
, 1989
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-76.pdf
BibTeX citation:
@techreport{Drako:M89/76, Author= {Drako, D.M. and Lyons, D.E.}, Title= {Test Structures for N-Level Metal}, Year= {1989}, Month= {Jun}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1265.html}, Number= {UCB/ERL M89/76}, }
EndNote citation:
%0 Report %A Drako, D.M. %A Lyons, D.E. %T Test Structures for N-Level Metal %I EECS Department, University of California, Berkeley %D 1989 %@ UCB/ERL M89/76 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1265.html %F Drako:M89/76