Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges
Michael A. Lieberman and S.E. Savas
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M89/121
, 1989
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-121.pdf
BibTeX citation:
@techreport{Lieberman:M89/121, Author= {Lieberman, Michael A. and Savas, S.E.}, Title= {Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges}, Year= {1989}, Month= {Oct}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1352.html}, Number= {UCB/ERL M89/121}, }
EndNote citation:
%0 Report %A Lieberman, Michael A. %A Savas, S.E. %T Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges %I EECS Department, University of California, Berkeley %D 1989 %@ UCB/ERL M89/121 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1352.html %F Lieberman:M89/121