J. Ramirez

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M89/139

, 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-139.pdf

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BibTeX citation:

@techreport{Ramirez:M89/139,
    Author= {Ramirez, J.},
    Title= {Electrical and Optical Test Structures for the Investigation of Lithography over Topography},
    Year= {1989},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1375.html},
    Number= {UCB/ERL M89/139},
}

EndNote citation:

%0 Report
%A Ramirez, J. 
%T Electrical and Optical Test Structures for the Investigation of Lithography over Topography
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/139
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1375.html
%F Ramirez:M89/139