Electrical and Optical Test Structures for the Investigation of Lithography over Topography

J. Ramirez

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/139
December 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-139.pdf

BibTeX citation:

@techreport{Ramirez:M89/139,
    Author = {Ramirez, J.},
    Title = {Electrical and Optical Test Structures for the Investigation of Lithography over Topography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1375.html},
    Number = {UCB/ERL M89/139}
}

EndNote citation:

%0 Report
%A Ramirez, J.
%T Electrical and Optical Test Structures for the Investigation of Lithography over Topography
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/139
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1375.html
%F Ramirez:M89/139