Gettering of Metallic Impurities with Implanted Carbon in Silicon
Hing Wong
EECS Department, University of California, Berkeley
1989
Advisors: Nathan W. Cheung
BibTeX citation:
@phdthesis{Wong:7751, Author= {Wong, Hing}, Title= {Gettering of Metallic Impurities with Implanted Carbon in Silicon}, School= {EECS Department, University of California, Berkeley}, Year= {1989}, }
EndNote citation:
%0 Thesis %A Wong, Hing %T Gettering of Metallic Impurities with Implanted Carbon in Silicon %I EECS Department, University of California, Berkeley %D 1989 %F Wong:7751