Electron Beam Probe Measurements of Electric Fields in RF Discharges

A.H. Sato and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/49

1990

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/Archive/ERL-90-49.pdf

BibTeX citation:

@techreport{Sato:M90/49,
    Author= {Sato, A.H. and Lieberman, Michael A.},
    Title= {Electron Beam Probe Measurements of Electric Fields in RF Discharges},
    Year= {1990},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1501.html},
    Number= {UCB/ERL M90/49},
}

EndNote citation:

%0 Report
%A Sato, A.H. 
%A Lieberman, Michael A. 
%T Electron Beam Probe Measurements of Electric Fields in RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1501.html
%F Sato:M90/49