M.V. Alves and Michael A. Lieberman and V. Vahedi and Charles K. (Ned) Birdsall

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/56

, 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-56.pdf

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BibTeX citation:

@techreport{Alves:M90/56,
    Author= {Alves, M.V. and Lieberman, Michael A. and Vahedi, V. and Birdsall, Charles K. (Ned)},
    Title= {Sheath Voltage Ratio for Asymmetric RF Discharges},
    Year= {1990},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1511.html},
    Number= {UCB/ERL M90/56},
}

EndNote citation:

%0 Report
%A Alves, M.V. 
%A Lieberman, Michael A. 
%A Vahedi, V. 
%A Birdsall, Charles K. (Ned) 
%T Sheath Voltage Ratio for Asymmetric RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/56
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1511.html
%F Alves:M90/56