Model of Magnetically Enhanced Capacitive RF Discharges

Michael A. Lieberman, Allan J. Lichtenberg and S.E. Savas

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/58
July 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-58.pdf

BibTeX citation:

@techreport{Lieberman:M90/58,
    Author = {Lieberman, Michael A. and Lichtenberg, Allan J. and Savas, S.E.},
    Title = {Model of Magnetically Enhanced Capacitive RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    Month = {Jul},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1517.html},
    Number = {UCB/ERL M90/58}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%A Lichtenberg, Allan J.
%A Savas, S.E.
%T Model of Magnetically Enhanced Capacitive RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/58
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1517.html
%F Lieberman:M90/58