Michael A. Lieberman and Allan J. Lichtenberg and S.E. Savas

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/58

1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-58.pdf

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BibTeX citation:

@techreport{Lieberman:M90/58,
    Author= {Lieberman, Michael A. and Lichtenberg, Allan J. and Savas, S.E.},
    Title= {Model of Magnetically Enhanced Capacitive RF Discharges},
    Year= {1990},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1517.html},
    Number= {UCB/ERL M90/58},
}

EndNote citation:

%0 Report
%A Lieberman, Michael A. 
%A Lichtenberg, Allan J. 
%A Savas, S.E. 
%T Model of Magnetically Enhanced Capacitive RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/58
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1517.html
%F Lieberman:M90/58