A One Dimensional Collisional Model for Plasma Immersion Ion Implantation

V. Vahedi and Michael A. Lieberman and M.V. Alves and J.P. Verboncoeur and Charles K. (Ned) Birdsall

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/60

1990

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/Archive/ERL-90-60.pdf

BibTeX citation:

@techreport{Vahedi:M90/60,
    Author= {Vahedi, V. and Lieberman, Michael A. and Alves, M.V. and Verboncoeur, J.P. and Birdsall, Charles K. (Ned)},
    Title= {A One Dimensional Collisional Model for Plasma Immersion Ion Implantation},
    Year= {1990},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html},
    Number= {UCB/ERL M90/60},
}

EndNote citation:

%0 Report
%A Vahedi, V. 
%A Lieberman, Michael A. 
%A Alves, M.V. 
%A Verboncoeur, J.P. 
%A Birdsall, Charles K. (Ned) 
%T A One Dimensional Collisional Model for Plasma Immersion Ion Implantation
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/60
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html
%F Vahedi:M90/60