A One Dimensional Collisional Model for Plasma Immersion Ion Implantation
V. Vahedi and Michael A. Lieberman and M.V. Alves and J.P. Verboncoeur and Charles K. (Ned) Birdsall
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M90/60
, 1990
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-60.pdf
BibTeX citation:
@techreport{Vahedi:M90/60, Author= {Vahedi, V. and Lieberman, Michael A. and Alves, M.V. and Verboncoeur, J.P. and Birdsall, Charles K. (Ned)}, Title= {A One Dimensional Collisional Model for Plasma Immersion Ion Implantation}, Year= {1990}, Month= {Jul}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html}, Number= {UCB/ERL M90/60}, }
EndNote citation:
%0 Report %A Vahedi, V. %A Lieberman, Michael A. %A Alves, M.V. %A Verboncoeur, J.P. %A Birdsall, Charles K. (Ned) %T A One Dimensional Collisional Model for Plasma Immersion Ion Implantation %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/60 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html %F Vahedi:M90/60