V. Vahedi and Michael A. Lieberman and M.V. Alves and J.P. Verboncoeur and Charles K. (Ned) Birdsall

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/60

, 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-60.pdf

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BibTeX citation:

@techreport{Vahedi:M90/60,
    Author= {Vahedi, V. and Lieberman, Michael A. and Alves, M.V. and Verboncoeur, J.P. and Birdsall, Charles K. (Ned)},
    Title= {A One Dimensional Collisional Model for Plasma Immersion Ion Implantation},
    Year= {1990},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html},
    Number= {UCB/ERL M90/60},
}

EndNote citation:

%0 Report
%A Vahedi, V. 
%A Lieberman, Michael A. 
%A Alves, M.V. 
%A Verboncoeur, J.P. 
%A Birdsall, Charles K. (Ned) 
%T A One Dimensional Collisional Model for Plasma Immersion Ion Implantation
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/60
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html
%F Vahedi:M90/60