Norman H. Chang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/61

1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-61.pdf

Advisors: Costas J. Spanos

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BibTeX citation:

@phdthesis{Chang:M90/61,
    Author= {Chang, Norman H.},
    Title= {Monitoring, Maintenance and Diagnosis in a Computer-Integrated Environment for Semiconductor Manufacturing},
    School= {EECS Department, University of California, Berkeley},
    Year= {1990},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1526.html},
    Number= {UCB/ERL M90/61},
}

EndNote citation:

%0 Thesis
%A Chang, Norman H. 
%T Monitoring, Maintenance and Diagnosis in a Computer-Integrated Environment for Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/61
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1526.html
%F Chang:M90/61