Monitoring, Maintenance and Diagnosis in a Computer-Integrated Environment for Semiconductor Manufacturing

Norman H. Chang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/61
July 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-61.pdf

Advisor: Costas J. Spanos

BibTeX citation:

@phdthesis{Chang:M90/61,
    Author = {Chang, Norman H.},
    Title = {Monitoring, Maintenance and Diagnosis in a Computer-Integrated Environment for Semiconductor Manufacturing},
    School = {EECS Department, University of California, Berkeley},
    Year = {1990},
    Month = {Jul},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1526.html},
    Number = {UCB/ERL M90/61}
}

EndNote citation:

%0 Thesis
%A Chang, Norman H.
%T Monitoring, Maintenance and Diagnosis in a Computer-Integrated Environment for Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/61
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1526.html
%F Chang:M90/61